http://ir-heater-star.com/zh/tags/%E9%80%94%E5%BE%84/ Recent content in 途径 on Five-Star Infrared Heating Systems Hugo zh Thu, 18 Jun 2026 00:59:21 +0800 http://ir-heater-star.com/zh/posts/tsv-through-silicon-via-heater/ Thu, 18 Jun 2026 00:59:21 +0800 http://ir-heater-star.com/zh/posts/tsv-through-silicon-via-heater/ <p><img src="http://ir-heater-star.com/images/c4487c91a5d0bd93963bf8b3a19ba704.png" alt="硅通孔加热器"></p> <p>在芯片制造过程中，TSV的刻蚀和填充工艺决定了几乎不存在温度变化的空间。如果光阻烘烤时的温度波动达到2摄氏度，就会导致关键尺寸控制失灵，进而使通孔填充层中出现空洞。而TSV加热器则能将整个晶圆上的温度控制在±0.1摄氏度范围内，确保整个工艺过程的稳定性。</p>