MEMS sensor wafer drying heater

Mon, 13 Jul 2026 16:51:23 +0800

Stop Heating the Air: A Better Way to Dry MEMS Wafers

If you’ve spent any time in MEMS fabrication, you know the struggle of drying wafers. It’s a balancing act. You want them bone-dry and residue-free, but you can’t just blast them with heat or you’ll warp the whole thing. Most people just throw them in a standard convection oven. The problem? Those ovens heat everything. They heat the air, the walls, the chassis… everything but the wafer. It’s a waste of power, and it’s a nightmare for whoever has to do maintenance. There’s nothing quite like the panic of touching a tool wall that’s still hot enough to sear your skin. That’s why we switched to directional heating with short-wave IR lamps.

MEMS on Five-Star Infrared Heating Systems

MEMS sensor wafer drying heater

Stop Heating the Air: A Better Way to Dry MEMS Wafers