Graphene processing infrared lamp

Sat, 20 Jun 2026 01:57:28 +0800

On the fab floor, photoresist bake profiles aren’t a preference—they’re the line between making yield and scrapping a lot. A 2°C drift during soft bake or hard bake can shift CDs, bring on scumming, and kill an entire lot. We built our graphene processing infrared lamps to take that uncertainty off the table. What actually matters, technically These lamps put out near-infrared tuned for fast, controlled thermal response, so you get wafer-level temperature uniformity within ±0.1°C across the bake surface. The graphene emitter holds stable radiance for thousands of hours—units have run 5,000+ hours with under 5% output drop. You get cleanroom-compatible construction rated for Class 1–100, with zero particle generation and a repeatable thermal ramp that keeps the process window tight. Power, voltage, and dimensions are configurable to match existing ports and fixtures, so integration is a direct swap-in, not a ground-up redesign. Why this works in lithography In lithography, you need a soft bake that pulls out solvent without triggering reflow, and a hard bake that cures without skinning. Our lamps hit target temperature fast, hold steady, and cool predictably, so every wafer sees the same thermal budget. That translates to better overlay accuracy, fewer reworks, and cycle times you can plan around. Energy use drops because the system heats on demand and holds temperature with minimal overshoot, and the long emitter life cuts down on spares inventory and maintenance windows. What you need to know up front These lamps are engineered to align with international semiconductor equipment standards, and they’re a verified, equivalent alternative to conventional halogen/quartz IR sources. Installation means matching reflector geometry and optical path clearance—if you swap lamps without checking focal distance, you’ll move the hot zone. Plan the retrofit around your chamber geometry, coolant flow, and interlocks, and you’ll keep particle counts down and uptime up.

Graphene on Five-Star Infrared Heating Systems

Graphene processing infrared lamp